序號 Serial number | 項 目 Project | 參 數 Parameters | 單位 Company |
1 | 有效加熱區域 Effective heating area | 長250*寬250*高250 Length 250 * width 250 * height 250 | mm |
2 | 處理基板尺寸 Processing substrate size | ≤250*250*250 ≤Length 250 * width 250 * height 250 | mm |
3 | 工作溫度 Maximum operating temperature | 950 | ℃ |
4 | 溫度 maximum temperature | 1000 | ℃ |
4 | 均溫性(900℃,保溫30分鐘后測量)Homogenization (900 ℃ for 30 minutes) | ±5 | ℃ |
5 | 控溫精度 control accuracy | ±1 | ℃ |
6 | 真空度 vacuum degree | 冷態極限(室溫)Cold limit (room temperature) | 優于 6.67 x 10-4 Better than 6.67 x 10-4 | Pa |
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| 工作 (空爐,900℃,保溫30min) work (empty furnace, 900 ℃ for 30min) | 優于 6.67 x 10-3 Better than 6.67 x 10-3 | Pa |
7 | 抽氣速率(1atm到6.67×10-3Pa) Pumping rate (1atm to 6.67 × 10-3pa) | 主抽閥打開后20min之內 Within 20min after the main extraction valve is opened | / |
9 | 壓升率 Pressure rise rate | < 1 | Pa/h |
10 | 升溫速率 heating rate | ≤20 | ℃/min |
11 | 溫度測量 temperature measurement | 一點控溫、一點金屬屏溫度監控,預留電極法蘭口,用于溫場測量One point temperature control, one point metal screen temperature monitoring, reserved electrode flange port for temperature field measurement | / |
12 | 均溫性測量口Temperature uniformity measuring port | 可帶5根熱電偶 With 5 thermocouples | / |